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Semiconductor Equipment - Chemical Mechanical Polishing

Download Chemical Mechanical Polishing info (1.4MB)

Polishing Machine

SPP-600
 
 
- high accuracy, highly integrated circuit on which multiple layers of wires are printed
- special head structure and clamping mechanism to stable process wafer
- for highly integrated wafer like Brittl material

Download SPP-600 info (0.4MB) [English]

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